Loss reduction technique in ferroelectric tunable devices by laser micro-etching. Application to a CPW stub resonator in X-band Article - Septembre 2014

Yonathan Corredores, Quentin Simon, Ratiba Benzerga, Xavier Castel, Ronan Sauleau, Arnaud Le Febvrier, Stéphanie Députier, Maryline Guilloux-Viry, Lingyan Zhang, Gérard Tanné

Yonathan Corredores, Quentin Simon, Ratiba Benzerga, Xavier Castel, Ronan Sauleau, Arnaud Le Febvrier, Stéphanie Députier, Maryline Guilloux-Viry, Lingyan Zhang, Gérard Tanné, « Loss reduction technique in ferroelectric tunable devices by laser micro-etching. Application to a CPW stub resonator in X-band  », IEEE Transactions on Electron Devices, septembre 2014, pp. 4166-4170. ISSN 0018-9383

Abstract

Ferroelectric materials are known to be lossy at microwaves. A local microetching technique based on laser ablation is implemented here to reduce the insertion loss of highly tunable devices fabricated on KTa1-xNbxO3 (KTN) ferroelectric thin films. The relevance of this approach is studied in X-band by comparing numerically and experimentally the performance of a frequency-tunable coplanar waveguide stub resonator before and after KTN microetching. The experimental data demonstrate a large loss reduction (by a factor 3.3), while keeping a high-frequency tunability (47%) under a moderate biasing static electric field (80 kV/cm). This approach paves the way for the design of ferroelectric reconfigurable devices with attractive performance in X-band and even beyond.

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