Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip Article - Mai 2009

J.B. Jager, P. Noe, E. Picard, V. Calvo, E. Delamadeleine, E. Hadji

J.B. Jager, P. Noe, E. Picard, V. Calvo, E. Delamadeleine, E. Hadji, « Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip  », Physica E : Low-dimensional Systems and Nanostructures, mai 2009, pp. 1127-1129. ISSN 1386-9477

Abstract

We report the fabrication process of ultrahigh-Q toroidal microcavities (10–50 μm diameter) and integration of erbium-doped silicon-rich oxide thin film inside these structures. The microcavities are studied by micro-photoluminescence and show the presence of whispering gallery modes at room temperature. Quality factors as high as 3000 are measured, limited by the setup resolution.

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